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Three Zone Vacuum Tube Furnace

Three Zones Tube Furnace (1200C) with High Vacuum Station + 4 Channel MFC Gas Station for CVD The OTF-1200X-III-HVC series furnace workstation consists of a OTF-1200X-III series three-zone tube furnace, a precision mass flow gas control station, a high vacuum station and other assembling parts....

The CVD tube furnace uses a double shell structure and the furnace adopts alumina fiber material, which can heat the sample to 1200. The left flange is equipped a digital vacuum display meter, the right flange is equipped with a KF-25 interface, which can be connected to the mechanical pump (pumping speed of 226L/m). At the same time, the left flange is equipped with a sleeve joint of φ6.35 so that the furnace body can be connected with the mixing system. The precise temperature control system provides 30  heating and cooling procedures, its’ temperature control accuracy is + / - 1 C.


Model

Mixture System

Heating zone length(mm)

Constant temp zone length(mm)

Vacuum degreePa

Max    temp(℃)

Continuous temp(℃)

Power(KW)

Voltage(V)

HTF1200-6/40-II-2F-LV

2F

400

200

0.1

1200

1100

3

220

HTF1200-8/40-II-2F-LV

2F

400

200

0.1

1200

1100

3

220

 


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