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High Vacuum Tube Furnace

1700°C Tube Furnace with High Vacuum System & MFC Gas Mixer GSL-1700X-4-HVC-UL is CE certified and TUV(UL61010) or CSA Ready 4" diameter single zone alumina tube furnace with high vacuum pump system (up to 10-5 torr) and 2 channel precision digital Mass flow-controllers, which can...

The CVD tube furnace uses a double shell structure and the furnace adopts alumina fiber material, which can heat the sample to 1700. The left flange is equipped a digital vacuum display meter, the right flange is equipped with a KF-25 interface, which can be connected to the mechanical pump (pumping speed of 226L/m). At the same time, the left flange is equipped with a sleeve joint of φ6.35 so that the furnace body can be connected with the mixing system. The precise temperature control system provides 30  heating and cooling procedures, its’ temperature control accuracy is + / - 1 C.


Model

Mixture System

Heating zone length(mm)

Constant temp zone length(mm)

Vacuum degreePa

Max    temp(℃)

Continuous temp(℃)

Power(KW)

Voltage(V)

HTF1700-6/30-2F-LV

2F

300

150

0.1

1700

1600

4

220

HTF1700-8/30-2F-LV

2F

300

150

0.1

1700

1600

4

220


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