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PECVD Tube Furnace

Compact Auto-Sliding PECVD Tube Furnace with 2"OD Quartz tube and vacuum pump OTF-1200X-50S-PE-SL is an affordable and compact PE-CVD ( Plasma Enhanced Chemical Vapor Deposition ) tube furnace system with a slideable mechanism. It consists of a 300W RF plasma generator, a 2"O.D split...

The furnace is a dual zone PE-CVD tube furnace system which consists of 500W RF plasma generator, speed controlled slidable mechanism, a pre-heater for sublimating the solid material and a high-quality oil-less pump. This PECVD is a new exploration tool for growing nanowire or using CVD to make various kinds of films.


Model

Tube size(mm)

Heating zone length(mm)

Constant temp zone length(mm)

Mixture System

Vacuum degreePa

Max    temp(℃)

Continuous temp(℃)

Power(KW)

Voltage(V)

HTF1200-6/40-II-L-V-2M-PE

φ60*2200

200+200

200

2M

1

1200

1100

4

220


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